Odo Wunnicke

Publication Activity (10 Years)

Years Active: 2005-2005
Publications (10 Years): 0

Publications

Karina Grundke, Astrid Drechsler, Nicole Petong, Cornelia Bellmann, Manfred Stamm, Odo Wunnicke, Jens Reichelt, Iris Mäge, B. Pinter, T. Pearce, M. Voigt
On the Effect of Cationic Surfactants in the Rinse to Reduce Pattern Collapse in High Aspect Ratio Patterning of Photoresists. ICMENS (2005)