Naoki Tamaoki

Publication Activity (10 Years)

Years Active: 2003-2003
Publications (10 Years): 0

Publications

Clemens Heitzinger, Wolfgang Pyka, Naoki Tamaoki, Toshiro Takase, Toshimitsu Ohmine, Siegfried Selberherr
Simulation of arsenic in situ doping with polysilicon CVD and its application to high aspect ratio trenches. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 22 (3) (2003)