Ming-Hua Hsiao

Publication Activity (10 Years)

Years Active: 2015-2015
Publications (10 Years): 1

Top Topics

Top Venues

Publications

Yu-Hsin Lin, Yuan-Chieh Cheng, Nien-Nan Chu, Wensyang Hsu, Yu-Hsiang Tang, Po-Li Chen, Chih-Chung Yang, Ming-Hua Hsiao, Chien-Nan Hsiao
The study of compensative structure assisted convex and concave corner structures etching by inductively coupled plasma-reactive ion etch (ICP-RIE). NEMS (2015)