Mieke Goethals

Publication Activity (10 Years)

Years Active: 2008-2009
Publications (10 Years): 0

Publications

Kurt Ronse, Philippe Jansen, Roel Gronheid, Eric Hendrickx, Mireille Maenhoudt, Vincent Wiaux, Mieke Goethals, R. Jonckheere, Geert Vandenberghe
Lithography Options for the 32 nm Half Pitch Node and Beyond. IEEE Trans. Circuits Syst. I Regul. Pap. (8) (2009)
Kurt Ronse, Philippe Jansen, Roel Gronheid, Eric Hendrickx, Mireille Maenhoudt, Mieke Goethals, Geert Vandenberghe
Lithography options for the 32nm half pitch node and beyond. CICC (2008)