Michael Switkes

Publication Activity (10 Years)

Years Active: 2001-2001
Publications (10 Years): 0

Publications

A. Keith Bates, Mordechai Rothschild, Theodore M. Bloomstein, Theodore H. Fedynyshyn, Roderick R. Kunz, Vladimir Liberman, Michael Switkes
Review of technology for 157-nm lithography. IBM J. Res. Dev. 45 (5) (2001)