M. Gentili

Publication Activity (10 Years)

Years Active: 1990-1990
Publications (10 Years): 0

Publications

M. Gentili, A. Lucchesini, L. Scopa, Paolo Lugli, A. Paoletti, G. Messina, S. Santangelo, A. Tucciarone
Modeling of electron beam scattering in high resolution lithography for the fabrication of X-Ray masks. Eur. Trans. Telecommun. 1 (2) (1990)