Kai-Chieh Kao

Publication Activity (10 Years)

Years Active: 2015-2015
Publications (10 Years): 0

Top Topics

Dielectric Constant

Top Venues

Publications

Kai-Chieh Kao, Chi-Jia Huang, Chang-Sian Wu, Yi-Lung Cheng
Thickness dependence on electrical and reliability properties for dense and porous low dielectric constant materials. IRPS (2015)
Kai-Chieh Kao, Chi-Jia Huang, Chang-Sian Wu, Yi-Lung Cheng
Electrical and reliability performance of atomic layer deposition HfO2 capping layer on porous low dielectric constant materials. IRPS (2015)