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K. Tseng
Publication Activity (10 Years)
Years Active: 2014-2014
Publications (10 Years): 0
Top Topics
Electron Beam Lithography
Response Time
Data Sets
Top Venues
NEMS
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Publications
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T. Lin
,
T. Huang
,
Y. Yang
,
K. Tseng
,
C. Fu
Throughput comparison of multi-exposure and multi-beam laser interference lithography on nano patterned sapphire substrate process.
NEMS
(2014)