K. P. Muller

Publication Activity (10 Years)

Years Active: 1988-1988
Publications (10 Years): 0

Publications

Joachim Pelka, K. P. Muller, Hermann Mader
Simulation of dry etch processes by COMPOSITE. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 7 (2) (1988)