Hongguang Liao

Publication Activity (10 Years)

Years Active: 2009-2009
Publications (10 Years): 0

Publications

Min Miao, Yufeng Jin, Hongguang Liao, Liwei Zhao, Yunhui Zhu, Xin Sun, Yunxia Guo
Research on deep RIE-based through-Si-via micromachining for 3-D system-in-package integration. NEMS (2009)