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H. S. Kothari
Publication Activity (10 Years)
Years Active: 1987-1987
Publications (10 Years): 0
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Publications
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J. K. Singh
,
A. Roybardhan
,
H. S. Kothari
,
B. R. Singh
,
W. S. Khokle
Dependence of process parameters on planarization isolation and etching of sloped vias in polyimides for GaAs ICs.
Proc. IEEE
75 (6) (1987)