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E. Bacher
Publication Activity (10 Years)
Years Active: 2007-2007
Publications (10 Years): 0
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Publications
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R. Zelsacher
,
A. C. G. Wood
,
E. Bacher
,
E. Prax
,
K. Sorschag
,
J. Krumrey
,
J. Baumgartl
A novel SIMS based approach to the characterization of the channel doping profile of a trench MOSFET.
Microelectron. Reliab.
47 (9-11) (2007)