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Christopher A. Bode
Publication Activity (10 Years)
Years Active: 2000-2007
Publications (10 Years): 0
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Publications
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Christopher A. Bode
,
Jin Wang
,
Q. Peter He
,
Thomas F. Edgar
Run-to-run control and state estimation in high-mix semiconductor manufacturing.
Annu. Rev. Control.
31 (2) (2007)
Thomas F. Edgar
,
Stephanie W. Butler
,
W. Jarrett Campbell
,
Carlos Pfeiffer
,
Christopher A. Bode
,
Sung Bo Hwang
,
K. S. Balakrishnan
,
Juergen Hahn
Automatic control in microelectronics manufacturing: Practices, challenges, and possibilities.
Autom.
36 (11) (2000)