New actuation method for push-pull electrostatic MEMS comb drive.
Tao ZhaoYung C. LiangPublished in: IEEE Trans. Ind. Electron. (2003)
Keyphrases
- detection method
- theoretical analysis
- high accuracy
- experimental evaluation
- synthetic data
- high precision
- classification method
- support vector machine svm
- computationally efficient
- genetic algorithm
- dynamic programming
- significant improvement
- fully automatic
- pairwise
- preprocessing
- computational complexity
- input data
- mathematical model
- segmentation method
- optimization method
- main contribution
- feature set
- classification accuracy
- computational cost
- prior knowledge
- similarity measure