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Monolithic Composite "Pressure + Acceleration + Temperature + Infrared" Sensor Using a Versatile Single-Sided "SiN/Poly-Si/Al" Process-Module.
Zao Ni
Chen Yang
Dehui Xu
Hong Zhou
Wei Zhou
Tie Li
Bin Xiong
Xinxin Li
Published in:
Sensors (2013)
Keyphrases
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infrared
multi sensor
electro optical
thermal imaging
infrared imagery
time of flight
infrared images
focal plane
infrared sensors
visible spectrum
automatic target recognition
target detection
multiresolution
image analysis
target detection and tracking
moving target detection
infrared video
real time