Experimental study on variations of WIPLOAD Control in semiconductor wafer fabrication environment.
Appa Iyer SivakumarChao QiAndy Darwin Kasan HidayatPublished in: WSC (2008)
Keyphrases
- experimental study
- wafer fabrication
- dispatching rule
- robotic systems
- real time
- control system
- mobile robot
- experimental evaluation
- process control
- complex environments
- home environment
- autonomous systems
- control theory
- dynamic environments
- neural network
- data sets
- human operators
- control method
- semiconductor manufacturing
- distributed control
- learning environment
- operating environment