Tracking plasma etch process variations using principal component analysis of oes data.
Beibei MaSeán F. McLooneJohn V. RingwoodPublished in: ICINCO-SPSMC (2007)
Keyphrases
- data sets
- data collection
- data sources
- data quality
- data structure
- data points
- small number
- synthetic data
- data mining techniques
- data distribution
- experimental data
- principal component analysis
- training data
- data processing
- database
- high dimensional data
- high dimensional
- data streams
- raw data
- redundant data
- high energy