Data Additive Residual Learning based Yield Prediction for Semiconductor Manufacturing.
Youjin LeePublished in: ICDE (2023)
Keyphrases
- data sets
- data collection
- learning process
- data points
- learning algorithm
- learning systems
- reinforcement learning
- prior knowledge
- data processing
- background knowledge
- historical data
- experimental data
- raw data
- image data
- spatial data
- sensor data
- data distribution
- database
- semiconductor manufacturing
- knowledge discovery
- data analysis
- data structure
- high quality
- machine learning
- neural network
- input data
- prediction accuracy
- end users
- data sources
- xml documents
- multistage
- human experts
- databases