Characterization of wafer-level XeF2 Gas-phase Isotropic Etching For MEMS Processing.

Dehui Xu Bin Xiong Guoqiang Wu Yinglei Ma Yuelin Wang Errong Jing

Published in: NEMS (2012)

Keyphrases

integrated circuit
data processing
real time
levels of abstraction
medical images
learning phase
information processing
genetic algorithm
neural network
website
case study
e learning
higher level
machine learning
data acquisition
lower level
real world
training phase
databases