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Characterization of wafer-level XeF2 Gas-phase Isotropic Etching For MEMS Processing.
Dehui Xu
Bin Xiong
Guoqiang Wu
Yinglei Ma
Yuelin Wang
Errong Jing
Published in:
NEMS (2012)
Keyphrases
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integrated circuit
data processing
real time
levels of abstraction
medical images
learning phase
information processing
genetic algorithm
neural network
website
case study
e learning
higher level
machine learning
data acquisition
lower level
real world
training phase
databases