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Modeling, Simulation and Supervisory Control of Semiconductor Manufacturing Cluster Tools with an Equipment Front-End Module.
Cheolhui Hong
Tae-Eog Lee
Published in:
CASE (2020)
Keyphrases
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discrete event simulation
semiconductor manufacturing
discrete event
supervisory control
dynamic systems
simulation model
process control
dynamical systems
data acquisition
mathematical model
real time
decision making
intelligent systems