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Modeling methodology: new approaches for simulation of wafer fabrication: the use of control variates and calibration metrics.
Chanettre Rasmidatta
Shari Murray
John W. Fowler
Gerald T. Mackulak
Published in:
WSC (2002)
Keyphrases
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discrete event simulation
control system
evaluation metrics
optimal control
evaluation methods
agent based modeling
wafer fabrication
learning algorithm
data acquisition
robotic systems
mathematical models
real time control
matlab simulink