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Electrothermally actuated resonant rate gyroscope fabricated using the MetalMUMPs.
Rana I. Shakoor
Shafaat Ahmed Bazaz
M. Burnie
Yongjun Lai
M. M. Hasan
Published in:
Microelectron. J. (2011)
Keyphrases
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high speed
fiber optic
data sets
multiresolution
real time
control scheme
open loop