A novel, zone based process monitoring method for low cost MCM-D substrates manufactured on large area panels.
Didier CottetMichael SchefflerGerhard TrösterPublished in: Microelectron. Reliab. (2002)
Keyphrases
- low cost
- objective function
- experimental evaluation
- preprocessing
- prior knowledge
- data sets
- computational complexity
- cost function
- detection method
- high accuracy
- neural network
- high precision
- segmentation method
- error rate
- detection algorithm
- optimization algorithm
- mutual information
- computational cost
- significant improvement
- computationally efficient
- main contribution
- support vector machine
- clustering method
- dynamic programming
- synthetic data
- optical flow
- mathematical model
- bayesian networks
- fully automatic
- evaluation method
- highly efficient