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Thermal Drift Investigation of an SOI-Based MEMS Capacitive Sensor with an Asymmetric Structure.

Haiwang LiYanxin ZhaiZhi TaoYingxuan GuiXiao Tan
Published in: Sensors (2019)
Keyphrases
  • neural network
  • artificial intelligence
  • sensor data
  • data fusion
  • hierarchical structure
  • real time
  • computer vision
  • data structure
  • complex structures