Investigation of acoustic properties and Raman scattering of AlN films for biosensor application.
Chung-Jen ChungPo-Tsung HsiehJen-Fin LinCheng-Hsiang LinKuo-Chih ChiuShean-Jen ChenChing-Liang WeiWei-Tsai ChangCheng-Ting ChenYing-Chung ChenKuo-Sheng KaoChien-Chuan ChengPublished in: NEMS (2011)