An Extended Object-oriented Petri Nets Modeling Based Simulation Platform for Real-time Scheduling of Semiconductor Wafer Fabrication System.
Huai ZhangZhibin JiangChengtao GuoHuiran LiuPublished in: SMC (2006)
Keyphrases
- petri net
- wafer fabrication
- colored petri nets
- simulation platform
- object oriented
- stochastic petri net
- mathematical modeling
- modeling tool
- petri net model
- discrete event systems
- manufacturing systems
- sequence diagrams
- service composition
- data model
- ims ld
- fuzzy petri net
- rapid prototyping
- agent technology
- computational intelligence
- programmable logic controller
- machine learning
- hardware and software
- data processing
- multi agent