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Big data analytics for cycle time related feature selection in the semiconductor wafer fabrication system.
Junliang Wang
Peng Zheng
Jie Zhang
Published in:
Comput. Ind. Eng. (2020)
Keyphrases
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wafer fabrication
feature selection
big data analytics
big data
text categorization
database systems
classification accuracy
decision support system
dispatching rule
feature space
np hard
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