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Big data analytics for cycle time related feature selection in the semiconductor wafer fabrication system.

Junliang WangPeng ZhengJie Zhang
Published in: Comput. Ind. Eng. (2020)
Keyphrases
  • wafer fabrication
  • feature selection
  • big data analytics
  • big data
  • text categorization
  • database systems
  • classification accuracy
  • decision support system
  • dispatching rule
  • feature space
  • np hard
  • mutual information