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A green scheduling model for two-stage photo-etching and acid-etching collaboration in semiconductor manufacturing.
Min Kong
Yajing Zhang
Jin Xu
Weizhong Wang
Shaojun Lu
Amir M. Fathollahi Fard
Published in:
J. Ind. Inf. Integr. (2024)
Keyphrases
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mathematical model
semiconductor manufacturing
computational model
management system
parameter estimation
simulation model
high level
conceptual model
objective function
expert systems
hidden markov models
markov random field
process model
neural network model