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A Fast Response MEMS Piezoelectric Microlens Actuator with Large Stroke and Low Driving Voltage.

Ssu-Han ChenAron MichaelChee Yee Kwok
Published in: NEMS (2018)
Keyphrases
  • high voltage
  • power system
  • high levels
  • transmission line
  • expert systems
  • control system
  • closed loop
  • database
  • operating conditions
  • neural network
  • genetic algorithm
  • control method
  • working principle