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Silicon-on-Insulator Substrates as a Micromachining Platform for Advanced Terahertz Circuits.

N. Scott BarkerMatthew F. BauwensArthur W. LichtenbergerRobert M. Weikle
Published in: Proc. IEEE (2017)
Keyphrases
  • cmos technology
  • silicon on insulator
  • high speed
  • low power
  • real time