Long-Term Stability Test on On-Wafer Measurement System in Frequency Ranges up to 325 GHz.

Ryo Sakamaki Masahiro Horibe

Published in: IEEE Trans. Instrum. Meas. (2021)

Keyphrases

long term
frequency ranges
frequency band
short term
integrated circuit
high speed
semiconductor manufacturing
high quality
multiresolution
computationally efficient
massively parallel