• search
    search
  • reviewers
    reviewers
  • feeds
    feeds
  • assignments
    assignments
  • settings
  • logout

A Colored Petri Net-based Approach to the Design of 300mm Wafer Fab Controllers.

Jonghun ParkSpyros A. ReveliotisDouglas A. BodnerChen ZhouLeon F. McGinnis
Published in: ICRA (2001)
Keyphrases