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A Colored Petri Net-based Approach to the Design of 300mm Wafer Fab Controllers.
Jonghun Park
Spyros A. Reveliotis
Douglas A. Bodner
Chen Zhou
Leon F. McGinnis
Published in:
ICRA (2001)
Keyphrases
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case study
petri net
colored petri nets
data mining
optimal design
design space
search engine
information systems
three dimensional
knowledge based systems
building blocks
design process
engineering design
controller design