Login / Signup
Optimal One-Wafer Cyclic Scheduling and Buffer Space Configuration for Single-Arm Multicluster Tools With Linear Topology.
Liping Bai
Naiqi Wu
Zhiwu Li
MengChu Zhou
Published in:
IEEE Trans. Syst. Man Cybern. Syst. (2016)
Keyphrases
</>
cyclic scheduling
optimal linear
semi infinite programming
dynamic programming
closed form
software tools
piecewise linear
optimal configuration
simple linear
expert systems
worst case
knowledge management
decision support
knowledge base
end users
semiconductor manufacturing
special case