A practical yield prediction approach using inline defect metrology data for system-on-chip integrated circuits.
Yuting KongDong NiPublished in: CASE (2017)
Keyphrases
- data sets
- integrated circuit
- data collection
- database
- raw data
- data points
- high quality
- data analysis
- data sources
- data distribution
- knowledge discovery
- data processing
- camera calibration
- experimental data
- spatial data
- missing data
- high dimensional data
- synthetic data
- data structure
- databases
- computer systems
- sensor data
- input data
- low cost
- probability distribution
- high dimensional
- original data
- data quality
- prediction model
- prediction error
- historical data
- predictive model
- meteorological data