Software Architecture and Subclassing Technique for Semiconductor Manufacturing Machines.
HyungTae KimHaeJeong YangPublished in: CoRR (2014)
Keyphrases
- software architecture
- semiconductor manufacturing
- discrete event simulation
- description language
- process control
- reference model
- software engineering
- production system
- distributed systems
- software systems
- functional requirements
- software development
- architectural design
- embedded software
- reference architecture
- database
- commercial off the shelf
- quality attributes
- control system
- web services
- relational databases
- multi agent
- database systems
- information systems