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Measurement and tracking control of the Z-tilts error compensating stage of the nano-measuring machine.
Van-Tsai Liu
Chien-Hung Liu
Hau-Wei Li
Chieh-Li Chen
Chun-Liang Lin
Yu-Chen Lin
Published in:
Kybernetes (2010)
Keyphrases
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tracking control
nonlinear systems
control law
error rate
adaptive neural
adaptive control
tracking error
fuzzy model
neural network
machine learning
artificial intelligence
decision making
knowledge base
pose estimation
adaptive fuzzy