A feedforward neural networks (FNN) used for semiconductor wafer fabrication parameters optimization.
Yongmei ChenXiangdong WangShoujue WangLinchu ShiPublished in: IJCNN (1999)
Keyphrases
- feedforward neural networks
- wafer fabrication
- neural network
- back propagation
- recurrent neural networks
- extreme learning machine
- hidden layer
- error function
- multilayer perceptron
- activation function
- fuzzy neural network
- pattern recognition
- optimization algorithm
- radial basis function
- autoregressive
- single hidden layer