Hierarchical indices to detect equipment condition changes with high dimensional data for semiconductor manufacturing.
Hui-Chun YuKuo-Yi LinChen-Fu ChienPublished in: J. Intell. Manuf. (2014)
Keyphrases
- high dimensional data
- semiconductor manufacturing
- nearest neighbor
- dimensionality reduction
- low dimensional
- discrete event simulation
- high dimensions
- high dimensional
- high dimensionality
- data analysis
- data points
- data sets
- similarity search
- subspace clustering
- dimension reduction
- process control
- original data
- dimensional data
- clustering high dimensional data
- sparse representation
- data distribution
- manifold learning
- input space
- lower dimensional
- input data
- nonlinear dimensionality reduction
- high dimensional spaces
- detection algorithm
- text data
- production system
- high dimensional data sets
- variable selection
- linear discriminant analysis
- image processing
- small sample size
- machine learning
- pattern recognition
- real time