An ANN approach for modeling the multisource yield learning process with semiconductor manufacturing as an example.
Toly ChenPublished in: Comput. Ind. Eng. (2017)
Keyphrases
- semiconductor manufacturing
- multi source
- learning process
- discrete event simulation
- artificial neural networks
- data fusion
- process control
- single source
- genetic algorithm
- learning algorithm
- reinforcement learning
- learning environment
- multiple sources
- information fusion
- data mining
- query processing
- expert systems
- e learning
- multi dimensional
- evolutionary algorithm
- discrete event
- artificial intelligence
- databases