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Study on shop floor control system in semiconductor fabrication by self-organizing map-based intelligent multi-controller.

Yeou-Ren ShiueRuey-Shiang GuhTsung-Yuan Tseng
Published in: Comput. Ind. Eng. (2012)
Keyphrases
  • control system
  • self organizing maps
  • shop floor
  • control architecture
  • neural network
  • real time
  • unsupervised learning
  • multi agent
  • fuzzy logic
  • manufacturing systems
  • data sets
  • closed loop