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The optimal geometry parameters and impact of parasitic capacitance and resistance of sub-14nm SOI multi-fin FinFETs.

Ke HanGuohui QiaoZhongliang DengQingbo LiHuashuai Xing
Published in: J. Intell. Fuzzy Syst. (2017)
Keyphrases
  • three dimensional
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  • evolutionary algorithm
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