First Demonstration of Vertical Stacked Hetero-Oriented n-Ge (111)/p-Ge (100) CFET toward Mobility Balance Engineering.

X.-R. Yu Wen Hsin Chang T.-C. Hong P.-J. Sung A. Agarwal G.-L. Luo C.-T. Wu K.-H. Kao C.-J. Su S.-W. Chang W.-H. Lu P.-Y. Fu J.-H. Lin P.-H. Wu T.-C. Cho W. C.-Yu. Ma Darsen D. Lu T.-S. Chao Tatsuro Maeda Yao-Jen Lee W.-F. Wu W.-K. Yeh Yeong-Her Wang

Published in: VLSI Technology and Circuits (2022)

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