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Development of Pneumatic Servo Bearing Actuator for Nanometer Positioning.
Masato Kadotani
Takakazu Kitagawa
Satoshi Katto
Tomoko Hirayama
Takashi Matsuoka
Hiroshi Yabe
Katsumi Sasaki
Published in:
Int. J. Autom. Technol. (2009)
Keyphrases
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control system
degrees of freedom
neural network
case study
development environment
rapid development
software engineering
knowledge management
information processing
fuzzy logic
knowledge based systems
database
development process
digital libraries
real world
control loop
working principle