Model Free iterative learning for table motion control of lithography machine.
Yuting LiPing LuoYunfeng PengZhiyuan LiuPublished in: ICISE (2023)
Keyphrases
- model free
- motion control
- iterative learning
- visual servoing
- mobile robot
- reinforcement learning
- control system
- robot control
- physical constraints
- function approximation
- autonomous robots
- autonomous navigation
- incremental learning
- error reduction
- real robot
- control algorithm
- machine learning
- dynamic environments
- learning algorithm
- data mining
- state space
- feature selection