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Optimal scheduling of transient cycles for single-armed cluster tools.

Dae-Kyu KimTae-Eog LeeHyun-Jung Kim
Published in: CASE (2013)
Keyphrases
  • optimal scheduling
  • clustering algorithm
  • software tools
  • end users
  • decision support
  • database
  • neural network
  • real world
  • website
  • case study
  • learning environment
  • data analysis
  • cluster analysis