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Research on Motion Control and Wafer-Centering Algorithm of Wafer-Handling Robot in Semiconductor Manufacturing.

Bing-Yuan HanBin ZhaoRuohuai Sun
Published in: Sensors (2023)
Keyphrases
  • semiconductor manufacturing
  • motion control
  • learning algorithm
  • dynamic programming
  • mobile robot
  • machine learning
  • multi robot
  • least squares
  • multistage
  • production system
  • image space
  • process control