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Research on Motion Control and Wafer-Centering Algorithm of Wafer-Handling Robot in Semiconductor Manufacturing.
Bing-Yuan Han
Bin Zhao
Ruohuai Sun
Published in:
Sensors (2023)
Keyphrases
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semiconductor manufacturing
motion control
learning algorithm
dynamic programming
mobile robot
machine learning
multi robot
least squares
multistage
production system
image space
process control