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A Compact Chemical-Resistant Microvalve Array Using Parylene Membrane and Pneumatic Actuation.
Zhishan Hua
Onnop Srivannavit
Yongmei Xia
Erdogan Gulari
Published in:
ICMENS (2004)
Keyphrases
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degrees of freedom
control system
linear array
chemical engineering
database
real time
pose estimation
path planning
motion planning
drug discovery
robot arm
joint space