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Modeling and identification of the dynamics of electrostatically actuated microcantilever with integrated thermal sensor.

Pranav AgarwalDeepak R. SahooAbu SebastianHaralampos PozidisMurti V. Salapaka
Published in: CDC (2008)
Keyphrases
  • automatic identification
  • physical processes
  • sensor networks
  • data acquisition
  • dynamic model
  • dynamical systems
  • open loop