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Modeling and identification of the dynamics of electrostatically actuated microcantilever with integrated thermal sensor.
Pranav Agarwal
Deepak R. Sahoo
Abu Sebastian
Haralampos Pozidis
Murti V. Salapaka
Published in:
CDC (2008)
Keyphrases
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automatic identification
physical processes
sensor networks
data acquisition
dynamic model
dynamical systems
open loop