BEOL-compatible Ta/HZO/W Ferroelectric Tunnel Junction with Low Operating Voltage Targeting for Low Power Application.
Leming JiaoZuopu ZhouZijie ZhengYuye KangChen SunQiwen KongXiaolin WangDong ZhangGan LiuLong LiuXiao GongPublished in: ICICDT (2022)