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BEOL-compatible Ta/HZO/W Ferroelectric Tunnel Junction with Low Operating Voltage Targeting for Low Power Application.

Leming JiaoZuopu ZhouZijie ZhengYuye KangChen SunQiwen KongXiaolin WangDong ZhangGan LiuLong LiuXiao Gong
Published in: ICICDT (2022)
Keyphrases
  • low power
  • high speed
  • power consumption
  • low cost
  • low power consumption
  • energy dissipation
  • ultra low power
  • general purpose
  • application specific
  • high power