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Laterally Movable Triple Electrodes Actuator toward Low Voltage and Fast Response RF-MEMS Switches.

Yasuyuki NaitoKunihiko NakamuraKeisuke Uenishi
Published in: Sensors (2019)
Keyphrases
  • low voltage
  • design considerations
  • power line
  • radio frequency
  • power management
  • control system
  • real time
  • relevance feedback
  • closed loop
  • multimedia
  • high resolution